Institut für Kristallzüchtung, Rudower Chaussee 6, D-12489 Berlin, Germany
*Max-Born-Institut für nichtlineare Optik und Kurzzeitspektroskopie, Rudower Chaussee 6, D-12489 Berlin, Germany

Growth and Characterisation of Silicon Crystallites on Laser Structured Glass

Selective growth of silicon crystallites on glass, seeded from silicon saturated metallic solution droplets is demonstrated. These droplets are deposited in micropore arrays which are generated in the glass substrate by ultrashort laser pulses. In this way, an equidistant distribution of crystallites can be achieved by preferred nucleation in the micropores. Additionally, a crystallite selection occurs corresponding to the tip geometry. The material transport is governed by the vapour-liquid-solid (VLS) mechanism. The morphological characterization of micropores and grown crystallites is performed by Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM) and Focused Ion Beam (FIB) method.

Keywords: Vapour-Liquid-Solid (VLS) Growth, Si on Glass, Focused Ion Beam (FIB) method
 

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