Crystal Research and Technology
Cryst. Res. Technol. 34 (1999) 391 - Abstract -

E. P. TRIFONOVA*, V. LASAROVA**, L. SPASSOV**, N. EFREMOVA*

* St. Kliment Ohridski University of Sofia, Faculty of Physics, Bulgaria
** Bulgarian Academy of Sciences, Institute of Solid State Physics, Sofia, Bulgaria

Composite Microhardness of Quartz – Al Structures

The microhardness-depth profiles of as-obtained and annealed quartz (substrate)-Al (film) structures have been investigated. A layer of constant hardness has been detected beneath the initial interface. This is supposed to result from incorporation of aluminium atoms into the surface layer of the substrate, reduction of SiO2 and diffusion of the atoms of a certain element during the processes of preparing and rapid thermal annealing of the structures.

Keywords: microhardness, Vickers, Knoop, quartz-Al structures, Al-films, thermal annealing


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