The results of structural investigations by means of transmission electron microscopy, diffraction and scanning electron microscopy of films prepared by pulse laser evaporation Ag₃SbS₃ single crystals are presented. The chemical composition of the films was controlled by X-ray fluorescence spectroscopy and Auger-electron spectroscopy. The effect of laser-evaporator pulse frequency, average single-pulse energy and substrate temperature on elemental chemical and phase composition and structure of deposited films was studied. The results show that the crystallization of amorphous films occurs according to homogeneous and heterogeneous mechanisms.

Keywords: laser, films, pulse, structure, electron microscopy, composition

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