A pulsed Nd:YAG Laser was used to evaporate solid targets of KTiOAsO4 (KTA) at power densities of 0.6 to 2.0x109 W/cm2. KTA thin films were deposited on glass, Si (100). After proper annealing treatment, single phase, (orthorh-ombic) polycrystalline KTA thin films were obtained. Some propitious of these thin films were also examined.
Keywords: KTA films, laser deposition