Nanoscale multilayers show properties completely different from bulk materials and are of great interest in the modern materials science. The characterisation of their structure and composition requires methods with spatial resolution of only few nanometers. The analytical transmission electron microscopy on cross sections is one of the most suitable methods. Imaging and spectroscopy of the same specimen details lead to essential information about correlation of structure and properties. The use of the analytical TEM with possibilities and limitations in the scanning mode will be demonstrated on four materials problems: oxygen bond in thin resistivity films (CuNi/NiCr), hard coating multilayers (TiN/Al₂O₃), and Fe/Al multilayers, as well as the degree of mixing within nanoscale Co/Cu multilayers.

Keywords: analytical TEM, EELS, EDS, multilayers, thin films, oxidation

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