The ranges of statistical description of the systems may be determined on the basis of inverse power law (Mandelbrot law). The slope of the straight line representing the power law in a double–logarithmic plot, determined as -1/µ (µ being a critical exponent), characterizes the distribution of elements in the microstructure. In this work the inverse power law is used to describe the microstructure and the statistical distribution of discontinuous metal films on dielectric substrates for µ < 2 (second and third case). The inhomogeneous films were obtained experimentally and using the computer simulations. The ranges of critical exponent µ, for which the Poisson, or Pareto’s distribution describes the microstructures, were determined. The statistics determined on the basis of microscopic examination is compared with that for the simulated microstructure.

Keywords: discontinuous films, microstructures, statistical description

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