Laser Scattering Tomography (LST) is used to investigate submicroscopic precipitates and the patterns of decorated defects in crystals. Experimental conditions to achieve quantitative results are described. Macroscopic volumes of the samples can be investigated inexpensively without focus degradation and with microscopic resolution by a technique called depth integration. Relative volumes of scatterers and statistical relevant distributions of relative precipitate volumes are determined by evaluation of the intensities in the LST images. The 3-dimensional arrangement of precipitates can be studied in stereoscopic images and by spatial computer reconstruction. Planes inside the crystals, preferably populated by decorated dislocations, can be revealed and evaluated for their orientation dependencies.

Keywords: laser scattering tomography, submicroscopic particles, precipitates, dislocations, glide planes, GaAs

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