Crystal Research and Technology
Cryst. Res. Technol. 37 (2002) 645 - Abstract -

M. S. Goorsky, B. K. Tanner*

Department of Materials Science and Engineering, University of California, Los Angeles, Ca, USA
Department of Physics, University of Durham, South Road, Durham, DH1 3LE, U.K.

Grazing Incidence In-plane Diffraction Measurement of In-plane Mosaic with Microfocus X-ray Tubes

The in-plane mosaic structure of Au/Fe and GaN-based epitaxial layers has been determined directly by laboratory-based grazing incidence in-plane x-ray diffraction in which Bragg reflections normal to the plane of the wafer are probed. High intensity and acceptable signal-to-noise can be obtained with no modifications to commercially available equipment. Excellent agreement is obtained between measurements of the same Au/Fe multilayer samples at the European Synchrotron Radiation Facility in Grenoble and with the laboratory system employing a focused x-ray beam from a microfocus generator. The technique is particularly important for the GaN-based systems as it uniquely provides a measure of the so-called twist mosaic independent of the out-of plane (tilt) mosaic.

Keywords: diffraction, x-ray


The full text of this paper in pdf-Format:

If you came directly to this page, click this symbol to go to the homepage of CRT.