The sinusoidal shape of light-induced surface relief gratings of polymers can be probed by x-ray scattering techniques. A particular approach of kinematic x-ray scattering theory is developed to interpret experimental scattering curves. The simulations demonstrate the particular sensitivity of x-ray reflectivity for very small grating amplitudes. At angles of incidence close to the critical angle of total external reflection a grating amplitude h < 2 nm already provides measurable grating peaks. In general the grating amplitude h can be measured from the envelope function over the grating peak maxima. The capability of the approach is demonstrated by simulation of the reflection curve recorded from a polymer sample with non uniform grating height.

Keywords: X-ray, relief, reflectivity

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