Cadmium telluride (CdTe) thin films were grown by thermal evaporation technique. The influence of post-growth heat treatment, isothermal and isochronal, on the structural and electrical properties of these films were carried out. Multi phases were obtained as a function of the period and the value of annealing temperature. In isothermal annealing, the sheet resistance was dropped by many orders while in isochronal annealing it was increased fairly. A correlation between the temperature and the annealing time and the structural characteristics of these films was established in both type of annealing. The grain size and the sheet resistance were found greatly affected by the type of annealing as well as the temperature and the annealing time.

Keywords: CdTe, thin film, electrical properties, structural properties

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