Optimization of thermal conditions during crystal growth in a multi-zone resistance furnace by K. Lin, P. Dold, K.W. Benz

Crystal Research and Technology

Cryst. Res. Technol. 38, 419 (2003) - Abstract -

Optimization of thermal conditions during crystal growth in a multi-zone resistance furnace

K. Lin, P. Dold, K.W. Benz

Kristallographisches Institut der Universität Freiburg, Germany

Keywords numerical simulation, inverse modeling, radiation heat transfer, float zone technique, Bridgman technique, FIDAP

The thermal condition is one the of most important control parameters for crystal growth. In this paper we present an effective numerical method in detail for optimizing thermal conditions in multi-zone crystal growth facilities, especially for crystal growth by the float zone (FZ) technique. A furnace function Ω is introduced to integrate the character of a growth furnace into a linear equation system. The desired power distribution can be therefore approached by solving the linear equation system iteratively. An expert system-like algorithm has been developed in order to obtain a more suitable solution for practical applications. This method was used to investigate thermal parameters for experiments of SiGe/GeSi single crystal growth by the FZ technique. It is an individual program which can be combined with any commercial finite element/finite volume (FE/FV) program such as FIDAP^TM.

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