Crystal Research and Technology
Cryst. Res. Technol. 38, 716 (2003) - Abstract -

Numerical study of the effects of cusp-shaped magnetic fields and thermal conductivity on the melt-crystal interface in CZ crystal growth

Koichi Kakimoto and Lijun Liu

Research Institute for Applied Mechanics, Kyushu University, 6-1, Kasuga-koen, Kasuga 816-8580, Japan

Keywords Czochralski method, semiconducting silicon, computer simulation, electromagnetic force; cusp-shaped magnetic fields
PACS 47.27.-I, 47.27.E, 81.10.Aj
DOI 10.1002/crat.200310086

A numerical study was carried out to determine the effects of magnetic fields and thermal conductivity of a crystal on the melt flow in a crystal growth system. Comparisons of computations for the case of no magnetic field and for two types of cusp-shaped magnetic fields were made. The effect of thermal conductivity of a crystal on the shape of a melt-crystal interface was also investigated. The computation results showed that the magnetic fields have clear effects on both the pattern and strength of flow of the melt and the interface shape. Application of a magnetic field to the Czochralski system is therefore an effective tool for controlling the quality of bulk crystal during Czochralski growth process. The results also showed that the shape of the interface could be modified by changing thermal conductivity of silicon.



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