Electron holographic material analysis at atomic dimensions by M. Lehmann and H. Lichte

Crystal Research and Technology

Cryst. Res. Technol. 40, 149 (2005) - Abstract -

Electron holographic material analysis at atomic dimensions

M. Lehmann and H. Lichte

Institute of Structure Physics (ISP), Dresden University, Zellescher Weg 16, 01062 Dresden, Germany

Keywords	HRTEM, off-axis electron holography, wave optics, phase detection limit, structural polarity of gallium arsenide, material analysis
PACS	68.37.Lp, 61.14.Nm, 81.05.Ea
DOI	10.1002/crat.200410318

In [110]-oriented GaAs, both types of atomic columns can hardly be distinguished by conventional transmission electron microscopy (TEM) because of the small difference of atomic numbers for Ga and As with Z_Ga = 31 and Z_As = 33. Quantitative off-axis electron holography allows unambiguously determining the structural polarity of GaAs in [110]-orientation, where, besides lateral resolution, the sensitivity of the phase signal plays the most important role. In order to attribute the phase signal only to the different types of atoms, two holographic experiments were performed using the same wedge-shaped GaAs-crystal, where for the second experiment, the sample was inserted into the holder upside down yielding an inverse structural polarity of GaAs.

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