Crystal Research and Technology
Cryst. Res. Technol. 41, 535 (2006) - Abstract -

Paramagnetic defects in diamond films synthesized by the hot filament chemical vapour deposition

A. Banaszak, K. Fabisiak, M. Kaczmarski*, and M. Kozanecki**

Department of Physics, University of Bydgoszcz, Pl. Weyssenhoffa 11, 85-072 Bydgoszcz, Poland
*Institute of Physics, A. Mickiewicz University, ul. Umultowska 85, 61-614 Poznan, Poland
**Faculty of Chemistry, Technical University of Lodz, ul. Zeromskiego 116, 90-924 Lodz, Poland

Keywords hot filament CVD, diamond film, ESR, Raman spectra
PACS 81.05.Zx, 81.05.Uw, 81.15.Gh
DOI 10.1002/crat.200510621

Defects in nitrogen-doped diamond films, produced by hot filament chemical vapour deposition have been studied by Electron Spin Resonance (ESR), Raman spectroscopy and Scanning Electron Microscopy (SEM). The peak-to-peak ESR line width (ΔHpp) varies in the range 0.36-0.52 mT and depends on the nitrogen concentration in the process gas. In the case of nitrogen-doped diamond films ESR spectrum shows a hyperfine structure typical of NS0 paramagnetic centre. The shape of the central ESR line shows that it is a superposition of two components: a narrower Lorentzian and a broader Gaussian one, characterized by different saturation behaviour. With increasing nitrogen concentration in process gas the ratio of integral intensities AG/AL (Gausian to Lorentzian) of ESR spectrum also increases. The Raman spectra show that with increasing doping level the diamond Raman line at 1332.5 cm-1 broadens, the broad band at about 1530 cm-1 becomes more pronounced what indicate on degradation of diamond crystallinity and it is in agreement with SEM observation.




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